Основной контент книги Atomic Layer Deposition
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Atomic Layer Deposition
Principles, Characteristics, and Nanotechnology Applications
€220,80
Raamatust
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
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Vanusepiirang:
0+Ilmumiskuupäev Litres'is:
02 oktoober 2018Objętość:
274 lk ISBN:
9781118747421Üldsuurus:
3.3 МБLehekülgede koguarv:
274Kustija:
Õiguste omanik:
John Wiley & Sons Limited
